| 摘要 |
PROBLEM TO BE SOLVED: To correct the deviation of a resist in the subscanning direction. SOLUTION: The device has a reference clock generating means, a means to measure the phase difference of a beam detecting signal by using the reference clock, a dividing means to divide the clock with a prescribed ratio, a PLL control means to perform the rotation control of a motor rotating a rotating polygon mirror provided with a laser scanning unit by using a frequency divided signal as an input, a control part to control the entire part, and a one- shot pulse generating means to generate the one-shot pulse by setting of the control part. By inputting the one-shot pulse signal from the one-shot pulse generating means in the dividing means and stopping the operation of the dividing means temporarily during the validated period of the one-shot pulse signal, the phase of the frequency divided signal inputted by the PLL control means is controlled independently, and the phase relation of each detecting signal of the beam is set so as to be out of the phase varying range of each beam detecting signal. |
