| 摘要 |
PROBLEM TO BE SOLVED: To suppress the deformation of a heat plate due to heat contraction of a supporting member. SOLUTION: A heat plate 65 in a post exposure baking device is supported by an annular supporting member 70 having a circular step 70a along the inner circumference thereof. The supporting member 70 is fixed on a support 74 with a plurality of bolts 71. The bolts 71 are provided on the inner circumferential surface of the step 70a facing the outer circumferential surface of the heat plate 65, in a manner that the circumferential surface on the side of the heat plate 65 of the bolts 71 may be exposed toward the side of the heat plate 65. In addition, a collar 76 is provided around the outer circumference of the bolt 71, and the heat plate 65 is fixed at a given position by the collar 76. |
