发明名称 LINEAR MOTOR, STAGE, ALIGNER, AND METHOD FOR MANUFACTURING DEVICE
摘要 PROBLEM TO BE SOLVED: To remove variation in the thrust to be generated by the higher harmonic components of magnetic force distribution of the magnets of a linear motor. SOLUTION: Though the stator 10 of the linear motor has magnetic sinusoidal magnetic force distribution by the arrangement of magnets 11, 12 it contains higher harmonic components other than a fundamental wave also. To remove unevenness of thrust by these, currents which contain correcting current commands -C.sin nθ, -C.sinn(θ+4/3π),-C.sinn(θ+2/3π) for canceling n-th order higher harmonic components respectively are supplied to coils 21 to 23 arranged by a phase difference of 120 degrees from the magnetic force distribution.
申请公布号 JP2001258289(A) 申请公布日期 2001.09.21
申请号 JP20000071440 申请日期 2000.03.15
申请人 CANON INC 发明人 YAMAZAKI TAKASHI
分类号 G12B5/00;G03F7/20;H01L21/027;H01L21/68;H02K41/03;H02P25/06 主分类号 G12B5/00
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