| 摘要 |
PROBLEM TO BE SOLVED: To enable the inspection of not only a defect extending in the conveyance direction but also a low-contrast defect extending in the width direction which is difficult to be detected by a conventional method. SOLUTION: Belt-shaped light is radiated obliquely against the conveyance direction on the surface of an inspection object 10 conveyed in one direction, and the irradiation part on the inspection object is imaged by a linear imaging element 14 arranged similarly obliquely to obtain sequential video signals, and a surface defect of the inspection object is detected based on the video signals.
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