CAPACITANCE TYPE HUMIDITY SENSOR

摘要

A capacitance type humidity sensor having at least two metal electrodes which is excellent in stability to humidity, temperature dependence, response speed, etc. and capable of considerably changing in capacitance. A preferred embodiment of the sensor has, interposed between the electrodes, a moisture-sensitive layer comprising a polyimide resin. The polyimide preferably has a group represented by the formula (1) or (2). (1) (R<1> and R<2> each is a single bond or an optionally substituted C1-20 hydrocarbon group.) (2) (R<3>, R<4>, R<6>, and R<7> each is alkyl or halogeno; R<5> is a single bond, -SO2-, -CO-, -O-, -S-, alkylene, or arylene; m and n each is an integer of 0 to 4; and p and q each is an integer of 0 to 4.)