发明名称 |
Method of manufacturing a ferroelectric capacitor configuration |
摘要 |
A ferroelectric capacitor configuration is configured with at least two different coercitive voltages. A first electrode structure having a surface which forms at least two levels is firstly produced. A layer of ferroelectric material of varying thickness is deposited over the first electrode by spin coating. A second electrode structure is subsequently formed on the layer of ferroelectric material.
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申请公布号 |
US2001022292(A1) |
申请公布日期 |
2001.09.20 |
申请号 |
US20010793350 |
申请日期 |
2001.02.26 |
申请人 |
HARTNER WALTER;SCHINDLER GUNTHER;WEINRICH VOLKER;KASKO IGOR |
发明人 |
HARTNER WALTER;SCHINDLER GUNTHER;WEINRICH VOLKER;KASKO IGOR |
分类号 |
H01L27/105;H01L21/02;H01L21/8246;(IPC1-7):H01G4/00 |
主分类号 |
H01L27/105 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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