发明名称 METAL SUBSTRATE WITH AN OXIDE LAYER AND AN IMPROVED ANCHORING LAYER
摘要 An article of manufacture includes a substrate and an anchoring layer disposed on a surface of the substrate. The substrate is capable of developing a first oxide on the surface which is tightly bonded thereto and includes a first metallic element. Alternatively, the surface is formed of the first oxide. The anchoring layer is formed with a ternary oxide of the first metallic element, a second metallic element and oxygen. A second oxide layer, which contains an oxide of the second metallic element, is disposed on the anchoring layer. The anchoring layer is formed on the substrate in a series of process steps, which include: establishing an atmosphere containing oxygen around the article; evaporating a compound of the first metallic element and a compound of the second metallic element into the atmosphere and forming a ternary gas phase containing the first metallic element, the second metallic element and the oxygen; and precipitating the ternary gas phase on the article.
申请公布号 EP0914498(B1) 申请公布日期 2001.09.19
申请号 EP19960927605 申请日期 1996.07.25
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 BEELE, WOLFRAM
分类号 C23C14/02;C23C14/08;C23C26/00;C23C28/00;C23C28/04 主分类号 C23C14/02
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