| 摘要 |
The invention relates to a novel antenna which is useful in the manufacture of a bolometer integrated on a silicon chip. An opening in the silicon chip is spanned by two separate thermally, isolated structures. A thin-film antenna, comprising two parts, is located on the structures, with one antenna part on each structure. Radiation received in the larger of the two antenna parts is coupled electromagnetically into the smaller part, where it causes a current to flow. The current is dissipated as heat. A thin-film thermometer measures the temperature rise of the smaller antenna part, due to the dissipated heat. The bolometer achieves improved performance in comparison to previous bolometer designs because the radiation is dissipated in a part of the antenna only, and the bolometer is free from impedance-matching constraints of other designs.
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