| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing fine metal balls requiring narrow grain size distribution and high true sphericity such as solder balls used for micro-soldering in a semiconductor device is the like and sealed light- emitting particles in a metal halide lamp without any flaws, damages or deformation, and a manufacturing apparatus suitable therefor. SOLUTION: In this manufacturing method of fine metal balls, the molten metal dripped from an orifice by giving the pressure and the vibration to the molten metal in a crucible is cooled and solidified in a gas atmosphere in a chamber to form fine metal balls of a diameter of <=1000μm, and the momentum of the fine metal balls is damped in a plurality of times and recovered, and this fine metal ball manufacturing apparatus comprises the crucible holding the molten metal and having the orifice in a bottom, an excitation unit which holds the molten metal and gives the vibration to the molten meal, the chamber where the droplet of the molten metal pressed out of the orifice is moved and solidified, and a damping means to reciprocate the fine metal balls generated by the movement and the solidification a plurality of times.
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