GRINDING PARTICLE FOR POLISHING AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide grinding particles for polishing capable of providing good surface roughness in polishing a polished board, and of stably polishing it while improving a polishing speed and to provide their manufacturing method. SOLUTION: Ultra-fine particles 11, 14 each having a particle diameter of 1 to 100 nm are fixed on the surface of a grinding particle 13 having a particle diameter of 0.1 to severalμm.