发明名称 |
Hermetically sealed semiconductor inertial sensor |
摘要 |
An inertial sensor has a sensing element formed on one surface of a chip of semiconductor material and which is movable with respect to the chip. The sensing element is enclosed in a sealed hollow structure, in which the hollow structure includes a metal wall disposed on the surface around the sensing element, and a closure plate fixed to the wall.
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申请公布号 |
US6289732(B1) |
申请公布日期 |
2001.09.18 |
申请号 |
US19970987255 |
申请日期 |
1997.12.09 |
申请人 |
SCS THOMSON MICROELECTRONICS S.R.L. |
发明人 |
MURARI BRUNO;FERRARI PAOLO;VIGNA BENEDETTO |
分类号 |
G01P1/02;G01P9/04;G01P15/08;(IPC1-7):G01P1/02 |
主分类号 |
G01P1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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