发明名称 Method and device for processing a flat workpiece, especially a semiconductor wafer
摘要 Semiconductor wafers are glued onto a carrier foil which is stretched across a frame. Instead of restretching the carrier foil directly at a processing machine, the foil is restretched on an adapter frame which can be stored and then later manipulated in the processing machine. The adapter frame includes a clamping ring, a base ring, and a threaded ring which secures the carrier foil.
申请公布号 US6291261(B1) 申请公布日期 2001.09.18
申请号 US20000508768 申请日期 2000.04.18
申请人 ALPHASEM AG 发明人 STARK KURT;KELLER MARKUS
分类号 H01L21/683;H01L21/00;H01L21/301;H01L21/687;(IPC1-7):H01L21/44 主分类号 H01L21/683
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