| 摘要 |
PROBLEM TO BE SOLVED: To detect displacement caused in other than a length measurement direction with a capacitance type sensor. SOLUTION: On two facing scales, a transmission electrode and a reception electrode are formed to constitute a capacitance type sensor. In addition to a sensor 100 displacing in original length measurement direction, sensors 200 and 300 are arranged in the direction perpendicular to the length measurement direction. In the case displacing in the direction other than the length measurement direction, the displacement is detected based on the detection signals from the sensor 200 and the sensor 300. For the displacement quantity, the displacement in the perpendicular direction to the length measurement, yaw angle and pitch angle can be detected. By correcting the original length measurement results with the detected displacement, the accuracy of the length measurement is improved.
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