| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing device equipped with a carburetor which does not become defective even left as it is under a high- temperature condition. SOLUTION: This semiconductor manufacturing device performs such control under the control of a device controller that the device detects whether or not film forming treatment ends in step S2 and, when the device detects that the treatment ends, the device actuates a timer to count time from '0' in step S3. In step S5, the device checks whether or not the count time of the timer (the leaving time of the carburetor under a high-temperature condition) reaches a prescribed value and, when the count time reaches the value, the device shifts to step S6 and forces the carburetor to execute dummy vaporization.
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