| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide by which an asymmetrical stress is not exerted on optical parts formed on a substrate. SOLUTION: Distortion is removed when clad thin films 3a-3n are solidified by laminating plural clad thin films 3a-3n to form a clad layer 3. Also, since the clad thin films 3a-3n are easy to be thickly laminated in recessed parts, the flat clad layer 3 is easy to be formed in the state of no distortion. Consequently, the asymmetrical stress is not exerted on the optical parts formed on the substrate 1. |
