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发明名称
Electrostatic chucks
摘要
申请公布号
AU738275(B2)
申请公布日期
2001.09.13
申请号
AU20000020836
申请日期
2000.03.13
申请人
DELSYS PHARMACEUTICAL CORPORATION
发明人
HOI CHEONG STEVE SUN;TIMOTHY ALLEN PLETCHER
分类号
B05C13/00;B05D1/06;H02N13/00
主分类号
B05C13/00
代理机构
代理人
主权项
地址
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