ANODIC OXIDIZATION METHODS

摘要

In an anodic oxidization method of the invention for anodizing areas including and surrounding a plurality of gate electrodes connected to a current supply line by respective gate connecting lines, the current supply line supplies currents to the gate electrodes in a manner that the densities of anodizing currents flowing through corresponding parts of any two parallel-running neighboring gate electrodes arranged in a semiconductor island area become substantially equal to each other. No leakage current flows from one gate electrode to another because the anodizing currents are supplied in such a way that no potential difference occurs between any two neighboring gate electrodes during anodic oxidization as a result of differences in current path length. This makes it possible to prevent crystal defects and partial anodization imperfections which could potentially be caused by leakage currents.