发明名称 |
Preparation of laser deposited oriented films and membranes |
摘要 |
A method of forming an oriented film. A target is provided and material from the target is ablated onto a substrate to form a film. The film is heated in a synthesis gel of the target material to orient the film.
|
申请公布号 |
US6287645(B1) |
申请公布日期 |
2001.09.11 |
申请号 |
US19990315805 |
申请日期 |
1999.05.21 |
申请人 |
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
BALKUS, JR. KENNETH J.;KINSEL MARY E.;WASHMON LISA L. |
分类号 |
C23C14/22;C23C14/28;C23C14/58;C30B23/02;(IPC1-7):C23C14/00;B05D3/14 |
主分类号 |
C23C14/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|