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发明名称
SEMICONDUCTOR PROCESSING METHOD, SEMICONDUCTOR CIRCUITRY, AND GATE STACKS
摘要
申请公布号
KR20010073111(A)
申请公布日期
2001.07.31
申请号
KR1020017002811
申请日期
2001.03.03
申请人
发明人
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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