| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve doughnut problem, leaf problem, aspect ratio problem, and inter-pattern connection problem which occur in a stencil mask. SOLUTION: It is judged whether a doughnut problem, a leaf problem, or an aspect ratio problem occurs in a mask pattern, the mask pattern is divided into two patterns, when it is found that a problem occurs, and the two patterns are allotted to two masks. When one of the problems occurs, the pattern of one of the masks is partially allotted to the other mask. When no doughnut problem and no leaf problem occur, it is determined for each mask as to whether an aspect ratio problem occurs, when it is found that an aspect ratio problem has occurred, the pattern of one of the masks is partially allotted to the other mask. When it is found that no aspect ratio problem occurs, it is determined whether a connection failure occurs to a pattern connection, and when it is found that a connection failure has occurred, an auxiliary pattern is provided to a pattern connection.</p> |
