发明名称 METHOD FOR AUTOMATICALLY EVALUATING EXPERIMENTAL RESULT
摘要 PROBLEM TO BE SOLVED: To provide a method by which experimental results can be processed automatically adaptively to a manufacturing process. SOLUTION: The manufacturing process has a plurality of control factors and experiments are carried out, so that a certain specific control factor may have at least two kinds of states, in order to acquire at least first and second experimental results. Each experimental result has a plurality of experimental data and represents a plurality of attributes. This method for automatically processing the experimental results includes a step of preparing a know-how table, having already known attributes which can be influenced when the specific control factor is changed, a step of indicating attributes having differences in the experimental data of the first and second experimental results by preparing an evaluation table through comparison of the differences between the experimental data of the first and second experimental results in each attribute, and a step of preparing a matching table for indicating the attributes existing on both the evaluation and know-how tables. The method also includes a step of preparing a nonmatching table for indicating attributes which exist on the evaluation table, but do not exist on the know-how table.
申请公布号 JP2001244162(A) 申请公布日期 2001.09.07
申请号 JP20000049828 申请日期 2000.02.25
申请人 PROMOS TECHNOLOGIES INC;MOSEL VITELIC INC;SIEMENS AG 发明人 CHRIS TSUAI
分类号 H01L21/302;H01L21/02;H01L21/66;(IPC1-7):H01L21/02;H01L21/306 主分类号 H01L21/302
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