POLISHING PAD SURFACE TEXTURE FORMED BY SOLID PHASE DROPLETS

摘要

A polishing pad (18) is made by a piezoelectric delivery system (13), and a method of making the pad includes, building successive layers of droplets of material one layer on another layer by dispensing the material in fluid phase as droplets arranged in a droplet pattern, and solidifying the droplets in the droplet pattern to provide the polishing surface with a surface texture having recesses bounded by the droplets in the droplet pattern.