| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-frequency power supply that can prevent an amplifier circuit from being damaged due to over current and over voltage. SOLUTION: A discrimination circuit 10 discriminates the ratio of a reflected power, with respect to a traveling wave power generated by amplification of an amplifier circuit 4 and a current limiting circuit 6 and a voltage limiting circuit 7 limit a voltage and/or a current generated in the amplifier circuit 4 in this high-frequency power supply, when the discriminated ratio P is in excess of a threshold T.
|
