发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To enhance the driving capability of the PMOS transistor without degrading the driving capability of the NMOS transistor of a CMOS transistor. SOLUTION: A NMOS transistor 31 is formed in the semiconductor region (SOI layer 14N) in the NMOS formation region 30 on a substrate (SOI substrate 11) and a PMOS transistor 51 is formed in the semiconductor region (SOI layer 14P) in the PMOS formation region 50 on the SOI substrate 11 to obtain a semiconductor device provided with a CMOS transistor 1. In this semiconductor device, the semiconductor region (SOI layer 14P) in the PMOS formation region 50 is so formed as to have compressive stress and the semiconductor region (SOI layer 14N) in the NMOS formation region 30 is so formed as to have stress smaller than the semiconductor region (SOI layer 14P) in the PMOS formation region 50 does.
申请公布号 JP2001244468(A) 申请公布日期 2001.09.07
申请号 JP20000056945 申请日期 2000.03.02
申请人 SONY CORP 发明人 KOMATSU YUJI
分类号 H01L21/316;H01L21/76;H01L21/762;H01L27/08;H01L29/786;(IPC1-7):H01L29/786 主分类号 H01L21/316
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