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发明名称
PROJEKTIONSSYSTEM FÜR GELADENE TEILCHEN
摘要
申请公布号
DE59509468(D1)
申请公布日期
2001.09.06
申请号
DE19955009468
申请日期
1995.01.12
申请人
IMS-IONEN MIKROFABRIKATIONS SYSTEME GES.M.B.H., WIEN
发明人
STENGL, GERHARD;CHALUPKA, ALFRED;VONACH, HERBERT
分类号
G03F7/20;H01J37/09;H01J37/30;H01J37/317;H01L21/027;(IPC1-7):H01L21/266;H01L21/263
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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