CZ METHOD BASED SINGLE CRYSTAL PULLING-UP EQUIPMENT SMOOTHLY PERFORMING RECHARGE.ADDITIONAL CHARGE

摘要

PROBLEM TO BE SOLVED: To provide a CZ method base single crystal pulling-up equipment provided, with a cooler and a heat shield in a furnace, and capable of smoothly performing additional charge and recharge of raw materials. SOLUTION: In the CZ method base single crystal pulling-up equipment, the cooler and the heat shield are lifted up and away from melted liquid surface when raw materials are additionally charged or recharged.