| 发明名称 |
Apparatus for storing and moving a cassette |
| 摘要 |
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
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| 申请公布号 |
US6283692(B1) |
申请公布日期 |
2001.09.04 |
| 申请号 |
US19980201737 |
申请日期 |
1998.12.01 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PERLOV ILYA;GANTVARG EVGUENI;BELITSKY VICTOR |
| 分类号 |
B65G1/00;B65G1/04;B65G49/07;H01L21/00;H01L21/673;H01L21/677;H01L21/687;(IPC1-7):B65G49/07 |
主分类号 |
B65G1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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