| 摘要 |
An inexpensive conveying system using a linear motor permits accurate stop positioning and controls generation of dust. The conveying system has a unit including a passive moving assembly and a plurality of sets of fixed coils to perform sending, non-energization travel, receiving, and positioning. The conveying and positioning unit is formed by the passive moving assembly composed of a permanent magnet and a linear sensor scale, and a fixed assembly having coils opposed to the moving assembly and sending and receiving sensor heads for detecting the position of the liner scale of the moving assembly. To achieve lower cost, the coils of the fixed assembly are provided only at a sending station and a receiving station, no additional coil being disposed therebetween.
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