发明名称 |
Location dependent automatic defect classification |
摘要 |
A method of manufacturing semiconductor devices wherein defects on each layer of a semiconductor wafer are determined to be killer or non-killer defects by correlating critical area information on a die with defect size and classification information. The killer/non-killer defect information is tabulated in a defect table from which statistical yield predictions can be made.
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申请公布号 |
US6284553(B1) |
申请公布日期 |
2001.09.04 |
申请号 |
US19990251012 |
申请日期 |
1999.02.16 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
STEFFAN PAUL J.;YU ALLEN S. |
分类号 |
H01L21/66;(IPC1-7):G01R31/26 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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