APPARATUS FOR PRECISELY DISPERSING/SUPPLYING FINE POWDER

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for precisely dispersing/supplying powder which can disperse/supply an extremely small amount of fine powder precisely and stably. SOLUTION: In the apparatus, a fine powder storage tank, a supply means for supplying the fine powder in the tank to a trace quantity supply feeder, the feeder, and a supply means for supplying the fine powder from the feeder to a next process are provided. A heating means is preferably installed in a conveyance passage for the fine powder supplied from the feeder, and a fine powder detecting sensor for confirming a supplying action on the fine powder is preferably installed in the feeder.