| 摘要 |
PROBLEM TO BE SOLVED: To provide heat a resistant member which is of sintered compact of a high silicon nitride having high cooling effect. SOLUTION: This member is of sintered compact of the silicon nitride, and is characterized in that, when the pressure difference between two spaces separated with the sintered compact is 0.1-15 atm, the permeability of cooling gas through the member is 10-10-10-5 mol/m2 Pasec. |
