发明名称 APPARATUS FOR COUPLING CARRIER COVER FOR PROTECTING POD DOOR AND CARRIER FOR RECEIVING CARRIER FOR HAVING ALIGNED WAFERS
摘要 PURPOSE: An apparatus for coupling a carrier cover for protecting a pod door and a carrier cover is provided to guarantee coupling between the pod door and the carrier cover, by using a coupling apparatus including a pair of penetration holes, a pair of guides, an inclined guide groove, an insert member, a pressure member, a pair of hook axes and two pair of hooks. CONSTITUTION: A pair of penetration holes(112) are formed in a pod door(110). A pair of guides(120) are installed inside the pad door, capable of reciprocating. An inclined guide groove(122) transfers each guide, installed in the guide to be aligned with the penetration hole. An insert member is selectively inserted into the guide groove by an elastic member, installed right under the respective guide groove. A pressure member(150) pressurizes the insert member through the penetration hole, installed in a port door(140) to correspond to each insert member. A pair of hook axes gear with the guide so that the hook axes perform a rotational motion according to the reciprocation of the guide. Two pairs of hooks selectively operate according to the rotational motion of the hook axis, and locks/separates the pod door and a carrier cover.
申请公布号 KR20010083592(A) 申请公布日期 2001.09.01
申请号 KR20000007446 申请日期 2000.02.17
申请人 ANAM SEMICONDUCTOR., LTD. 发明人 LEE, BYEONG CHEOL
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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