发明名称 REMOVING SOLUTION FOR RUTHENIUM SERIES METAL AND USING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To prepare a removing solution for ruthenium series metal having excellent capacities of sufficiently dissolving and removing ruthenium series metal such as ruthenium and ruthenium oxide and moreover preventing the resticking of the dissolved ruthenium series metal. SOLUTION: This removing solution for removing ruthenium series metal contains (a) cerium nitrate (IV) salt and (b) one or more acids selected from the group consisting of nitric acid, perchloric acid and acetic acid.
申请公布号 JP2001234373(A) 申请公布日期 2001.08.31
申请号 JP20000046150 申请日期 2000.02.23
申请人 NEC CORP;KANTO CHEM CO INC 发明人 AOKI HIDEMITSU;WATANABE KAORI;ISHIKAWA NORIO;MORI KIYOTO
分类号 C01G55/00;C23F1/10;C23F1/30;C23G1/02;H01L21/3213;(IPC1-7):C23G1/02 主分类号 C01G55/00
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