| 摘要 |
PROBLEM TO BE SOLVED: To remove a foreign material entering a fine gap, in the case where a pressure in the gap cannot be increased even when air is blown with a high speed into the about 10-μm gap, the gap may be damaged by high-pressure air in the case of low strength of the gap, and electro-static adsorption increases on a smaller diameter of the gap. SOLUTION: The device comprises mechanisms 6 and 7 for conveying a tape-shaped member that moves a long tape-shaped member 3 in a substantially horizontal direction, the member 3 having fine gaps formed thereon with predetermined intervals, a cover 8 which surrounds the tape-shaped member 3 at an intermediate position on a horizontal moving path of the tape-shaped member 3 and forms an opening window 8a on an upper surface, an ultrasonic horn 11 whose lower end is inserted into the cover 8 from the opening window 8a of the cover 8 and is opposed to the fine gaps of the tap-shaped member 3 to emit ultrasound onto the tape-shaped member 3 and vibrate the tape-shaped member 3, an air supply mechanism 12 which supplies pressure air into the cover 8 from the moving path of the tape-shaped member 3 and blows air onto the vibrating tape-shaped member 3, and an air absorbing mechanism 13 which absorbs air blown onto the vibrating part of the tape-shaped member 3 outside the cover 8 and removes a foreign material on the tape-shaped member 3 having the fine gaps.
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