PROGRAMMED-TEMPERATURE DESORPTION GAS ANALYZING DEVICE

摘要

PROBLEM TO BE SOLVED: To provided a programmed-temperature desorption analyzing device where the temperature of a sample surface and a control temperature in a thermocouple are equal to each other. SOLUTION: At least the upper portion of a sample stage 1 is formed out of a highly thermal conductive material, and a thermocouple 2 and the surface of a sample 4 are respectively brought into contact with the sample stage 1 to heat by thermal conduction and the difference in temperature from the sample stage 1 is removed.