| 摘要 |
<p>PROBLEM TO BE SOLVED: To realize an image observation method in a scanning electron microscope and a scanning electron microscope which allow anybody to observe an image of the scanning electron microscope on the optimum conditions corresponding to the type and observation purpose of a sample. SOLUTION: A memory 21 is so arranged to previously store the range of an acceleration voltage and the range of a spot size corresponding to the type of a sample, the range of the spot size corresponding to magnification, the range of the acceleration voltage and the range of the spot size corresponding to an analytic means. In the specified observation using a scanning electron microscope, firstly, an operator selects an indication mode of the observation purpose using a pointing device 22. As a result, a controller 13 controls a display control circuit 18 to display a condition selection screen on a display 20. The operator selects necessary conditions using the condition selection screen. When the condition is selected, the optimum observation condition for the condition selected is read out of the memory 21. The controller 13 controls an electronic optical system based on the observation condition.</p> |
