CERAMIC HEATER AND SUPPOTING PIN FOR SEMICONDUCTOR MANUFACTURING AND TESTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a ceramic heater enabled to keep a constant distance between a semiconductor wafer and a ceramic base board at all times, and to heat the semiconductor wafer uniformly, and to protect the semiconductor wafer from contamination, without dropping out a supporting pin. SOLUTION: The ceramic heater having the ceramic base board with a heating body on the surface or inside of the ceramic base board, is constructed so as to hold and heat the semiconductor wafer with a distance from the surface of the ceramic base board.