| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a ceramic substrate for semiconductor manufacturing/ inspecting devices that can prevent clean spots from being generated on the ceramic substrate, and can control a heating surface at uniform temperature even if the ceramic substrate is used at 200 deg.C or higher. SOLUTION: On the ceramic substrate for semiconductor manufacturing/ inspecting device where a resistance electrical heating element consisting of one or at least two circuits is provided, an external terminal is connected to the end of the circuit, a lead wire in connected to the external terminal, and the connection part between the external terminal and the lead wire is covered with an insulation covering material.</p> |
