| 摘要 |
PROBLEM TO BE SOLVED: To provide a local treatment device which can improve the efficiency of surface treatment by stably efficiently causing gas discharge. SOLUTION: This local treatment device has an electromagnetic shielding casing member 21, and a discharge tube 40 through which a process gas is made to flow in the member 21. This device is also provided with a pair of electrodes 46 and 48 which are faced oppositely to each other on both sides of the tube 40, and an inverted-T shaped protective member 36 composed of a dielectric substance between the tube 40 and electrodes 46 and 48. Consequently, the electrodes 46 and 48 and casing member 21 are isolated from each other.
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