| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe type three-dimensional shape measuring apparatus capable of stably performing accurate measurement without damaging a workpiece to be measured nor becoming unable to measure even if particles of dust cling to the top of the workpiece or if the workpiece is flawed or stained. SOLUTION: The measuring apparatus includes a light emission means for forming a spot-like detection area when the three-dimensional configuration of the workpiece to be measured is measured by scanning the surface of the workpiece with a measuring probe, a dust detection means for detecting dust or flaws on the surface of the workpiece, a drive means for driving the probe so that the detection area scans a track ahead of the scanning track of the measuring probe, and a control means for moving the scanning track in a direction approximately perpendicular to the scanning direction when the measuring probe comes to a detecting position after the dust detection means detect dust or flaw, to thereby avoid the encounter of the dust or flaws with probe.
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