| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum-treating device which can sufficiently secure the heat transfer between a placing base and a heating medium without bringing the medium into direct contact with the base. SOLUTION: This vacuum-treating device is provided with a constant- temperature member 3 having a constant-temperature surface 3a which is maintained in a constant-temperature state during the treatment of an object W to be treated in a treatment chamber 2. An electrostatic chuck device 5 which holds the object W in the chamber 2 has the placing base 4 which is set up in the chamber 2 to face the constant-temperature surface 3a, and an electrostatic chuck section 16 which is provided on the placing surface 4a of the base 4 and attracts and holds the object W with an electrostatic force. The vacuum-treating device is also provided with a heat-conductive sheet 30 which is interposed between the placing base 4 and constant-temperature member 3, has a surface 30a adhered closely to the base 4 and a rear surface 30b adhered closely to the member 3, and secures the heat transfer between the base 4 and member 3.</p> |
