| 摘要 |
PROBLEM TO BE SOLVED: To provide a remounting system of a process gas supply unit capable of remounting a module corresponding to each variation, in the process gas supply unit compact and in light weight. SOLUTION: In this process gas supply unit 1, mounting a check valve 11, a purge valve 12, a regulator 13 with interrupting function, a supply valve 15, and either one of a mass flow controller 14 or a sensor pack in a single base block 10 formed with flow paths 21 to 26, the mass flow controller 14 and the sensor pack can be remounted relating to the same base block 10.
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