ELECTRON EMISSION SOURCE AND ITS PRODUCTION METHOD

摘要

PURPOSE: To provide a field emission type cold cathode electron emission source of improved uniformity in electron emission, and its production method. CONSTITUTION: The electron emission source 10 is equipped with a substrate 11 with a number of through holes 13 made of a material with metal as the main component, which serves as a nucleus of formation of nanotube-shaped fiber and, a film 12 made of the nanotube-shaped fiber disposed on the surface of the substrate 11 and on a wall of penetrating hole 14. The source 10 is made of iron or alloy including iron. The producing procedure of the source 10 is as follows; Substrate 11 having a number of through holes 13 is heated and held at a certain temperature in a material gas atmosphere in which a gas composed of carbonaceous compounds is contained in a certain concentration. Nanotube-shaped fiber made of carbon is made to grow on the surface of the substrate 11 and the wall of the through hole 14 into a curled state. Then a film 12 is formed to cover the substrate 11 and the through hole 14.