发明名称 METHODS OF MANUFACTURING STAMPER AND FORMED SUBSTRATE
摘要 <p>A method of manufacturing a stamper, comprising the steps of manufacturing, by electrocasting, a father (4) from an original disk (I3) having a resist pattern formed thereon, laterally connecting a plurality of the donut-shaped fathers (4) on a stainless steel substrate (10) so as to form a father collected body (4S), manufacturing, from the father collected body (4S), a mother collected body (9S) of double layer structure comprising a glass disk (8) and a resin layer (7), providing, by electrocasting, a son collected body (6S) as an intended collected body of stamper from the mother collected body (9S), and separating the son collected body from the mother collected body (9S) so as to obtain a son stamper (6).</p>
申请公布号 WO2001063015(P1) 申请公布日期 2001.08.30
申请号 JP2001000692 申请日期 2001.02.01
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