| 摘要 |
PURPOSE: A fastening device for a purge ring is provided to prevent rotational and vertical displacement of a purge ring caused by purge gas exiting the purge ring or caused by other processing conditions. CONSTITUTION: The fastening device comprises a clamp(20) which releasably holds the purge ring(19) together with the wafer support. A pin(21) is inserted into a bore(32) through the purge ring(19), wafer support and the clamp to releasably secure the clamp(20) in place. Slots may be formed in the purge ring(19) to guide placement of the clamp(20). Thus, the device prevents movement of the purge ring without causing damage to the pedestal, the purge ring, or the substrate.
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