| 摘要 |
A first HSQ film composed of a Si-O-based film with a low dielectric constant is formed on a first wiring via a protective insulation film, and the surface of this first HSQ film is reformed to form a first SRO layer. Then, a second HSQ film is formed on this first SRO layer, and the surface of the second HSQ film is reformed to form a second SRO layer. Next, a via-hole is formed within a predetermined region, which reaches the protective insulation film on the first wiring. Then, wiring trenches forming a second wiring are formed within predetermined regions of the second HSQ film and the second SRO film while using the first SRO film as an etching stopper film. Thereafter, the protective insulation film at the bottom of the via-hole is etched and removed, and the wiring trenches and the via-hole are embedded with a conductive film. Then, the conductive film on the second SRO layer is removed while using the second SRO layer as a CMP stopper film.
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