Probe and method for examining electrical characteristics of devices

摘要

Provided is a probe whose characteristic impedance can be accurately adjusted to the desired value with the production of a small number of prototypes. The probe includes a first line provided with a signal terminal to be connected to a signal electrode of a circuit to be measured and at least one first region which is connected to the signal terminal and to which one end of a chip capacitor is connected, a second line which is connected to a terminal that belongs to the first line and is located opposite to the connecting end and provided with a junction to be connected to the measuring instrument at the remaining terminal and an impedance matched to the characteristic impedance of the measuring instrument, a ground conductor provided with a ground terminal to be connected to the ground electrode of the circuit to be measured and at least one second region which is connected to the ground terminal and on which the remaining terminal of the chip capacitor is mounted in one-to-one correspondence with the first region. The impedance of the probe viewed from the circuit to be measured is provided by a chip capacitor mounted in specified positions within the first region and the second region.