| 发明名称 |
Apparatus for removing a coating film |
| 摘要 |
A slit type blow nozzle 14 for ejecting a blow gas 1 and a slit type chemical rinse nozzle 12 for ejecting a rinse chemical 2 are arranged such that the blow gas removes a coating film dissolved by the chemical rinse from the end surface of a glass substrate.
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| 申请公布号 |
US2001017191(A1) |
申请公布日期 |
2001.08.30 |
| 申请号 |
US20010791793 |
申请日期 |
2001.02.26 |
| 申请人 |
NEC CORPORATION |
发明人 |
HASHIMOTO YOSHIAKI;SATO YASUYUKI |
| 分类号 |
G03F7/16;B05C9/12;B05D3/10;B05D7/00;B08B3/02;B08B3/08;H01L21/00;H01L21/027;H05K3/06;(IPC1-7):H01L21/00 |
主分类号 |
G03F7/16 |
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