发明名称 Control circuit with automatic DC offset
摘要 An automatic gain control circuit in the feedback path for a laser wavelength control circuit is described herein. This gain control circuit automatically adjusts the amplification of the analog signals output from a photodetector array, where the array detects a fringe pattern created by a laser beam. Another feature of the preferred embodiment feedback circuit is the automatic setting of a DC offset voltage that compensates for errors in the feedback path and enables an accurate determination of a dark level signal in the fringe pattern signal. This dark level signal provides a reference for measuring the magnitude of the fringe pattern signal. Varying photodetector outputs may now be more accurately measured. The preferred embodiment feedback circuit also employs a very fast amplifier anti-saturation circuit using LED's connected in a clamp circuit.
申请公布号 US6282218(B1) 申请公布日期 2001.08.28
申请号 US19990241319 申请日期 1999.02.01
申请人 CYMER, INC. 发明人 ANDERSON STUART L.
分类号 H01S3/13;H01S3/137;H01S5/0683;H01S5/0687;H03G1/00;H03G3/30;(IPC1-7):H01S3/00 主分类号 H01S3/13
代理机构 代理人
主权项
地址