发明名称 Solid state imaging apparatus, and video system using such solid state imaging apparatus
摘要 This invention prevents an end portion of the LOCOS region having a large number of defects of an MOS sensor from depletion and thereby reduces the leak current that occurs in the defects in the end portion of the LOCOS region. An n-type layer region is formed in a surface area of a p-type substrate for constituting a photodiode with the p-type layer. A LOCOS region is formed on a p+-type layer in a surface area of the silicon substrate as device separation region by oxidizing part of the silicon substrate. The n-type layer region and the LOCOS region are separated from each other by a predetermined distance. A contact region is formed and separated from the n-type layer region by a distance equal to the size of the gate electrode of the read-out transistor of the MOS sensor. A wiring layer is connected to the contact region. Then, a planarizing layer is formed to cover the n-type layer region, the LOCOS region, the gate electrode and the wiring layer.
申请公布号 US6281533(B1) 申请公布日期 2001.08.28
申请号 US19970933306 申请日期 1997.09.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MIYAGAWA RYOHEI;YAMASHITA HIROFUMI;SASAKI MICHIO;OBA EIJI;TANAKA NAGATAKA;MABUCHI KEIJI
分类号 H01L27/146;H04N5/335;H04N5/355;H04N5/361;H04N5/369;H04N5/374;H04N5/3745;(IPC1-7):H01L31/062;H01L31/113 主分类号 H01L27/146
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